The Isolation Oxidation of Silicon (Q3818028)

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The Isolation Oxidation of Silicon
scientific article

    Statements

    title
    The Isolation Oxidation of Silicon (English)
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    author
    John R. King
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    publication date
    1989
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    zbMATH Keywords
    isolation oxidation
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    silicon
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    integrated circuits
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    moving boundaries
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    a Newtonian fluid
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    reaction controlled oxidation
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    Identifiers

    DOI
    10.1137/0149016
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    Mathematics Subject Classification ID
    76R50
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    76D07
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    35C20
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    zbMATH DE Number
    4089207
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