A multi-scale simulation of tungsten film delamination from silicon substrate (Q2385899)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A multi-scale simulation of tungsten film delamination from silicon substrate |
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A multi-scale simulation of tungsten film delamination from silicon substrate (English)
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15 October 2007
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Multi-scale simulation
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film delamination
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molecular dynamics
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size effect
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