Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (Q331291)

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Nonlinear analysis of electrostatically actuated diaphragm-type micropumps
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    Statements

    title
    Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (English)
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    author
    Mehrdad Sheikhlou
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    Rasoul Shabani
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    Ghader Rezazadeh
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    publication date
    26 October 2016
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    zbMATH Keywords
    micropump
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    electrostatic actuation
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    circular diaphragm
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    nonlinear analysis
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    Identifiers

    zbMATH DE Number
    6643984
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    Wikidata QID
    Q58483173
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    OpenAlex ID
    W2135422431
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