Study on electrothermally actuated cantilever array for nanolithography (Q617152)
From MaRDI portal
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Study on electrothermally actuated cantilever array for nanolithography |
scientific article |
Statements
Study on electrothermally actuated cantilever array for nanolithography (English)
0 references
21 January 2011
0 references
nanolithography
0 references
scanning probe lithography
0 references
electrothermal actuation
0 references
