Study on electrothermally actuated cantilever array for nanolithography

DOI10.1007/S11431-010-0097-1MaRDI QIDQ617152zbMATH OpenOpenAlexFDO

Authors Jianyu Fu, Dapeng Chen, Tianchun Ye

Publication date 21 January 2011

Published in Science China. Technological Sciences (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s11431-010-0097-1

zbMATH Keywords

electrothermal actuationnanolithographyscanning probe lithography

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Thermal effects in solid mechanics (74F05) Electromagnetic effects in solid mechanics (74F15)

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