Study on electrothermally actuated cantilever array for nanolithography

DOI10.1007/S11431-010-0097-1zbMath1205.80019OpenAlexW1972245710MaRDI QIDQ617152

Tianchun Ye, Jianyu Fu, Dapeng Chen

Publication date: 21 January 2011

Published in: Science China. Technological Sciences (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11431-010-0097-1

zbMATH Keywords

electrothermal actuationnanolithographyscanning probe lithography

Mathematics Subject Classification ID

Thermal effects in solid mechanics (74F05) Electromagnetic effects in solid mechanics (74F15) Technical applications of optics and electromagnetic theory (78A55)

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