Study on electrothermally actuated cantilever array for nanolithography

DOI10.1007/S11431-010-0097-1zbMATH Open1205.80019OpenAlexW1972245710MaRDI QIDQ617152FDOQ617152

Authors: Jianyu Fu, Dapeng Chen, Tianchun Ye 

Publication date: 21 January 2011

Published in: Science China. Technological Sciences (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11431-010-0097-1

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zbMATH Keywords

electrothermal actuationnanolithographyscanning probe lithography

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Thermal effects in solid mechanics (74F05) Electromagnetic effects in solid mechanics (74F15)

Cited In (1)

• Modeling of processes in tunneling lithography

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