Study on electrothermally actuated cantilever array for nanolithography (Q617152)
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scientific article; zbMATH DE number 5839954
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| English | Study on electrothermally actuated cantilever array for nanolithography |
scientific article; zbMATH DE number 5839954 |
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Study on electrothermally actuated cantilever array for nanolithography (English)
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21 January 2011
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nanolithography
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scanning probe lithography
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electrothermal actuation
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0.6655594110488892
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0.6515659689903259
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0.6480024456977844
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0.645865261554718
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0.6391050219535828
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