Adaptive mass alteration to model ion-ion recombination in a particle-in-cell simulation of silane radio-frequency discharges

DOI10.1016/j.cpc.2010.06.033zbMath1219.78144MaRDI QIDQ548981

Yong-Cai Geng, Sumit K. Garg

Publication date: 30 June 2011

Published in: Computer Physics Communications (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cpc.2010.06.033

zbMATH Keywords

mass alteration; PIC method; RF discharge

Mathematics Subject Classification ID

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