Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in

DOI10.1016/j.na.2005.01.055zbMath1224.78044OpenAlexW2022370408MaRDI QIDQ999955

V. Rochus, Daniel J. Rixen, Jean-Claude Golinval

Publication date: 4 February 2009

Published in: Nonlinear Analysis. Theory, Methods \& Applications. Series A: Theory and Methods (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.na.2005.01.055

zbMATH Keywords

dynamicsfinite elementelectromechanical couplingmicro-systemspull-in

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10)

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