Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (Q1667756)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers |
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Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (English)
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30 August 2018
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dynamic response
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micro and nano electromechanical systems
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micro cantilevers
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assembled micro cantilever probes (ACPs)
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GDQM
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GDQEM
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