A continuum-based modeling of MEMS devices for estimating their resonant frequencies

DOI10.1016/j.cma.2008.07.017zbMath1194.74140OpenAlexW2068235105MaRDI QIDQ2638133

Yanyan Li

Publication date: 14 September 2010

Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cma.2008.07.017

zbMATH Keywords

finite element methodelectric fieldmesh motiontotal Lagrangianelectric stiffness

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Electromagnetic effects in solid mechanics (74F15)

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Cites Work

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• A Lagrangian approach for quantum-mechanical electrostatic analysis of deformable silicon nanostructures
• Coupling between electromagnetic and mechanical vibrations of thin-walled structures
• Partitioned analysis of coupled mechanical systems

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