Robust control and data‐driven tuning of a hybrid integrator‐gain system with applications to wafer scanners

DOI10.1002/acs.2888zbMath1417.93121OpenAlexW2801698210WikidataQ129894062 ScholiaQ129894062MaRDI QIDQ5222723

Daniel Andreas Deenen, M. F. Heertjes, N. Irigoyen Perdiguero

Publication date: 10 July 2019

Published in: International Journal of Adaptive Control and Signal Processing (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/acs.2888

zbMATH Keywords

circle criterionmotion controldata-based optimizationnonlinear integrator

Mathematics Subject Classification ID

Sensitivity (robustness) (93B35) Control/observation systems governed by partial differential equations (93C20) Application models in control theory (93C95) Frequency-response methods in control theory (93C80) Robust stability (93D09)

Related Items (2)

Stability and performance analysis of hybrid integrator-gain systems: a linear matrix inequality approach ⋮ Editorial for the Special Issue on Learning‐based Adaptive Control: Theory and Applications

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