Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (Q259298)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method |
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Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (English)
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11 March 2016
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wave scattering
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diffraction
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integral equations
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mathematical modeling
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nanostructures
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