Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing (Q1915979)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing |
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Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing (English)
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1 July 1996
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modeling and control of processes
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neural network
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