Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing (Q1915979)
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scientific article; zbMATH DE number 895079
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| English | Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing |
scientific article; zbMATH DE number 895079 |
Statements
Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing (English)
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1 July 1996
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modeling and control of processes
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neural network
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0.8557975
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0.81730294
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0.80801296
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0.8077878
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0.8043252
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