A microsystem for the fracture characterization of polysilicon at the micro-scale (Q1949073)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A microsystem for the fracture characterization of polysilicon at the micro-scale |
scientific article |
Statements
A microsystem for the fracture characterization of polysilicon at the micro-scale (English)
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25 April 2013
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microsystem
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polysilicon fracture
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mechanical testing
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cohesive crack simulation
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