A microsystem for the fracture characterization of polysilicon at the micro-scale

DOI10.1016/j.euromechsol.2010.09.006zbMath1261.74027MaRDI QIDQ1949073

A. Merassi, Alberto Corigliano, F. Zaraga, A. Longoni, Giacomo Langfelder, Aldo Ghisi

Publication date: 25 April 2013

Published in: European Journal of Mechanics. A. Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.euromechsol.2010.09.006

zbMATH Keywords

mechanical testing; polysilicon fracture; microsystem; cohesive crack simulation

Mathematics Subject Classification ID

74R10: Brittle fracture

74S05: Finite element methods applied to problems in solid mechanics

74-05: Experimental work for problems pertaining to mechanics of deformable solids

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Cites Work

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• Computational modelling of impact damage in brittle materials
• From crack deflection to lattice vibrations--macro to atomistic examination of dynamic cleavage fracture
• Fracture Toughness and Subcritical Crack Growth in Polycrystalline Silicon