Dynamics of electrostatic microelectromechanical systems actuators (Q2861712)

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Dynamics of electrostatic microelectromechanical systems actuators
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    title
    Dynamics of electrostatic microelectromechanical systems actuators (English)
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    DOI
    10.1063/1.3684748
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    author
    Yisong Yang
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    Le Zhao
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    Rui-feng Zhang
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    publication date
    11 November 2013
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    Mathematics Subject Classification ID
    74A60
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    74F15
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    78A30
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    78A55
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    74H10
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    74S60
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    zbMATH DE Number
    6224894
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    OpenAlex ID
    W1977847933
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    arXiv ID
    1201.5439
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