Study on electrothermally actuated cantilever array for nanolithography (Q617152)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Study on electrothermally actuated cantilever array for nanolithography |
scientific article |
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Study on electrothermally actuated cantilever array for nanolithography (English)
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21 January 2011
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nanolithography
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scanning probe lithography
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electrothermal actuation
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