Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication (Q5375866)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication |
scientific article; zbMATH DE number 6937363
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication |
scientific article; zbMATH DE number 6937363 |
Statements
Design and Control for High-Speed Nanopositioning: Serial-Kinematic Nanopositioners and Repetitive Control for Nanofabrication (English)
0 references
14 September 2018
0 references
