3D-measurement using a scanning electron microscope

DOI10.1016/J.AMC.2010.01.107MaRDI QIDQ603088zbMATH OpenOpenAlexFDO

Authors Eduard Reithmeier, Taras Vynnyk, Thanin Schultheis

Publication date 5 November 2010

Published in Applied Mathematics and Computation (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.amc.2010.01.107

zbMATH Keywords

backscattered electronsphotometric methodscanning electron microscopesecondary electronsshape from shading

Mathematics Subject Classification ID

Electron optics (78A15) Diffraction, scattering (78A45) Technical applications of optics and electromagnetic theory (78A55)

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Cites work

• An improved method to detect riblets on surfaces in nanometer scaling using SEM
• On the Efficacy of Nonlinear Control in Uncertain Linear Systems

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• Grid method, moiré and deflectometry
• An improved method to detect riblets on surfaces in nanometer scaling using SEM
• scientific article; zbMATH DE number 2031606 (Why is no real title available?)
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