Concepts and algorithms in process simulation

MaRDI QIDQ688756zbMATH OpenFDO

Authors Meinhard Paffrath, Werner Jacobs, Wolfram Klein, Ernst Rank, Karl Steger, Ulrich Weinert, U. Wever

Publication date 6 December 1993

Published in Surveys on Mathematics for Industry (Search for Journal in Brave)

zbMATH Keywords

\(2D\) process simulator MIMAS-IIadaptive grid refinementfinite elementsgeometrical device structurenumerical algorithmsprocess simulationsemiconductor devices

Mathematics Subject Classification ID

Probabilistic models, generic numerical methods in probability and statistics (65C20) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Applications to the sciences (65Z05) Technical applications of optics and electromagnetic theory (78A55)

Review text

For the general-purpose \(2D\) process simulator MIMAS-II -- elaborated for semiconductor devices on a silicon basis -- the essential numerical algorithms are discussed. The two basic problems are: the processing of the geometrical device structure and the determination of the field quantities, both being closely coupled.

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