scientific article; zbMATH DE number 3890680

MaRDI QIDQ3347237zbMATH OpenFDO

Authors Horst Elschner, Wilfried Klix, Rainer G. Spallek

Publication date 1984

zbMATH Keywords

simulationcomputer aided designdiffusion equationsemiconductorselectromagnetic equationsdopingthermal problems in microelectronics

Mathematics Subject Classification ID

Probabilistic models, generic numerical methods in probability and statistics (65C20) Technical applications of optics and electromagnetic theory (78A55) Partial differential equations of mathematical physics and other areas of application (35Q99) Applications to the sciences (65Z05)

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