scientific article; zbMATH DE number 3890680
zbMATH Open0558.65088MaRDI QIDQ3347237FDOQ3347237
Authors: Horst Elschner, Wilfried Klix, Rainer G. Spallek 
Publication date: 1984
Title of this publication is not available (Why is that?)
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simulationcomputer aided designdiffusion equationsemiconductorselectromagnetic equationsdopingthermal problems in microelectronics
Probabilistic models, generic numerical methods in probability and statistics (65C20) Technical applications of optics and electromagnetic theory (78A55) Partial differential equations of mathematical physics and other areas of application (35Q99) Applications to the sciences (65Z05)
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