Analysis and simulation of two-dimensional dopant diffusion in silicon

MaRDI QIDQ2708598zbMATH OpenFDO

Authors W. Merz, Jens Lang

Publication date 21 September 2003

zbMATH Keywords

existencereaction-drift-diffusion equationsSobolev spaces

Mathematics Subject Classification ID

Parabolic equations and parabolic systems (35K99) Applications to the sciences (65Z05) Statistical mechanics of semiconductors (82D37)

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• Single dopant diffusion in semiconductor technology
• Two-dimensional adaptive simulation of dopant diffusion in silicon
• Maximum a posteriori estimation of activation energies that control silicon self-diffusion

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