scientific article; zbMATH DE number 1295002

MaRDI QIDQ4247925zbMATH OpenFDO

Authors W. Merz, K. Pulverer, Elke Wilczok

Publication date 3 June 1999

zbMATH Keywords

existencehigh concentration doping conditionslow concentration reaction-diffusion modelnonlinear diffusion equationnumerical computations

Mathematics Subject Classification ID

Nonlinear parabolic equations (35K55) Diffusion (76R50)

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• On the Diffusion of Point Defects in Silicon
• High Concentration Arsenic Diffusion in Crystalline Silicon: An Asymptotic Analysis
• Single dopant diffusion in semiconductor technology
• Two-dimensional adaptive simulation of dopant diffusion in silicon

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