Maximum a posteriori estimation of activation energies that control silicon self-diffusion

DOI10.1016/J.AUTOMATICA.2008.01.020MaRDI QIDQ999024zbMATH OpenOpenAlexFDO

Authors Charlotte T. M. Kwok, Kapil Dev, Edmund G. Seebauer, Richard D. Braatz

Publication date 30 January 2009

Published in Automatica (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.automatica.2008.01.020

zbMATH Keywords

parameter estimationBayesian estimationrapid thermal processingsemiconductor processes

Mathematics Subject Classification ID

Control/observation systems governed by partial differential equations (93C20) Estimation and detection in stochastic control theory (93E10)

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Cites work

• scientific article; zbMATH DE number 3473616 (Why is no real title available?)
• scientific article; zbMATH DE number 3565945 (Why is no real title available?)
• Qualitative and quantitative experiment design for phenomenological models - a survey

Cited in

(1)

• Diffusion of Dopant in Crystalline Silicon: An Asymptotic Analysis

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