Flatness Based Approach to a Heat Conduction Problem in a Crystal Growth Process

DOI10.1007/11529798_24MaRDI QIDQ5701483zbMATH OpenOpenAlexFDO

Authors J. Rudolph, Jan Winkler, Frank Woittennek

Publication date 3 November 2005

Published in Lecture Notes in Control and Information Science (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/11529798_24

zbMATH Keywords

boundary control, crystal growth, distributed parameter systemscrystallizationflatnessfree boundaryheat equationsemiconductorsolid-liquid interfacetrajectory planning

Mathematics Subject Classification ID

Phase transformations in solids (74N99) Stefan problems, phase changes, etc. (80A22) Statistical mechanics of semiconductors (82D37)

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(4)

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• Control of batch cooling crystallization processes based on orbital flatness
• Accurate numerical simulation of radiative heat transfer with application to crystal growth
• Controllability of the Stefan problem by the flatness approach

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