A combination of characteristics and Monte Carlo methods for etch profile simulation (Q1294150)
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scientific article; zbMATH DE number 1310993
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
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| English | A combination of characteristics and Monte Carlo methods for etch profile simulation |
scientific article; zbMATH DE number 1310993 |
Statements
A combination of characteristics and Monte Carlo methods for etch profile simulation (English)
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1998
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0.6814625263214111
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