Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method (Q1705387)
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scientific article; zbMATH DE number 6850610
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| English | Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method |
scientific article; zbMATH DE number 6850610 |
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Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method (English)
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15 March 2018
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wave scattering
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diffraction
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integral equations
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mathematical modeling
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nanostructures
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0.93408555
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0.9112321
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0.8341658
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0.83052987
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0.82823443
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0.8274331
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0.8272086
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0.81459546
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