Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method (Q1705387)

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Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method
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    Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method (English)
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    15 March 2018
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    wave scattering
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    diffraction
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    integral equations
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    mathematical modeling
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    nanostructures
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