Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (Q1877236)
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scientific article; zbMATH DE number 2091448
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| English | Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors |
scientific article; zbMATH DE number 2091448 |
Statements
Mixed-hybrid finite elements for the simulation of thermal oxidation in semiconductors (English)
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16 August 2004
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Dual-mixed finite elements
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Hybrid finite elements
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Thermal oxidation process
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Semiconductor technology
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Compressible and incompressible fluid mechanical problems
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0.8930476903915405
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0.8820670247077942
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0.7947574257850647
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