Residual stresses in silicon-on-sapphire thin film systems (Q2428387)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Residual stresses in silicon-on-sapphire thin film systems |
scientific article |
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Residual stresses in silicon-on-sapphire thin film systems (English)
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24 April 2012
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multilayer
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thin film
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residual stress
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buffer layer
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cooling
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