Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information (Q869280)
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English | Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information |
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Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. I: Analysis for obtaining film stress from non-local curvature information (English)
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2 March 2007
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thin films
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non-uniform misfit strain
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non-uniform film thickness
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non-local stress-curvature relations
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interfacial shears
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