Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures (Q608625)
From MaRDI portal
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures |
scientific article |
Statements
Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures (English)
0 references
25 November 2010
0 references
non-uniform misfit strain
0 references
non-uniform wafer curvatures
0 references
stress-curvature relations
0 references
non-local effects
0 references
interfacial shears
0 references