Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures (Q608625)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures |
scientific article |
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Non-uniform, axisymmetric misfit strain in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures (English)
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25 November 2010
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non-uniform misfit strain
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non-uniform wafer curvatures
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stress-curvature relations
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non-local effects
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interfacial shears
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