Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference (Q2482829)
From MaRDI portal
!
This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use the normal view instead:
scientific article; zbMATH DE number 5267327
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference |
scientific article; zbMATH DE number 5267327 |
Statements
Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference (English)
0 references
24 April 2008
0 references
quality control
0 references
stochastic processes
0 references
pattern recognition
0 references
semiconductor manufacturing
0 references
0.8642862
0 references
0.8289126
0 references
