Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference (Q2482829)
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scientific article; zbMATH DE number 5267327
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| English | Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference |
scientific article; zbMATH DE number 5267327 |
Statements
Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference (English)
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24 April 2008
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quality control
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stochastic processes
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pattern recognition
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semiconductor manufacturing
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0.8642862
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0.8289126
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