Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process (Q2687804)
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scientific article; zbMATH DE number 7660595
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| English | Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process |
scientific article; zbMATH DE number 7660595 |
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Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process (English)
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7 March 2023
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dynamic linearization
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adaptive iterative extended state observer
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model predictive control
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0.8461316
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0.8084464
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0.80770516
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0.80544776
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0.8036089
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