Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process

DOI10.1016/J.JFRANKLIN.2023.01.035MaRDI QIDQ2687804zbMATH OpenOpenAlexFDO

Authors Junchao Ren, Ding Liu, Yin Wan

Publication date 7 March 2023

Published in Journal of the Franklin Institute (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.jfranklin.2023.01.035

zbMATH Keywords

adaptive iterative extended state observerdynamic linearizationmodel predictive control

Mathematics Subject Classification ID

Model predictive control (93B45) Iterative learning control (93B47) Observers (93B53) Adaptive control/observation systems (93C40)

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Cites work

• Active Disturbance Rejection Control for Nonaffined Globally Lipschitz Nonlinear Discrete-Time Systems

Cited in

(3)

• Data-driven model-free adaptive control of particle quality in drug development phase of spray fluidized-bed granulation process
• Prescribed performance based data-driven adaptive sliding mode control for discrete-time nonlinear systems
• Distributed matrix-weighted fusion model predictive control algorithm

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