Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine (Q3018726)
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scientific article; zbMATH DE number 5932641
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| English | Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine |
scientific article; zbMATH DE number 5932641 |
Statements
Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine (English)
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27 July 2011
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actuators
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control systems
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cybernetics
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piezoelectricity
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tracking
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0.7717101573944092
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0.7369042038917542
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0.72982257604599
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0.7194246649742126
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