Development of a framework for analyzing process monitoring data with applications to semiconductor manufacturing process (Q3298702)
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scientific article; zbMATH DE number 7221004
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| English | Development of a framework for analyzing process monitoring data with applications to semiconductor manufacturing process |
scientific article; zbMATH DE number 7221004 |
Statements
Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (English)
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15 July 2020
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semiconductor manufacturing
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data mining
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decision tree
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artificial neural network
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Taguchi parameter design
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0.7167860865592957
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0.7156658172607422
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0.712571918964386
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