Implementing virtual metrology for in-line quality control in semiconductor manufacturing (Q3183733)
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scientific article; zbMATH DE number 5618790
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
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| English | Implementing virtual metrology for in-line quality control in semiconductor manufacturing |
scientific article; zbMATH DE number 5618790 |
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Implementing virtual metrology for in-line quality control in semiconductor manufacturing (English)
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21 October 2009
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quality control
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semiconductor manufacturing
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virtual metrology
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SPC
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0.8305120468139648
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0.7205281853675842
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0.7196037173271179
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0.7084969282150269
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