Data transformation in SPC for semiconductor machinery control: A case of monitoring particles (Q3369499)
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scientific article; zbMATH DE number 5002964
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| English | Data transformation in SPC for semiconductor machinery control: A case of monitoring particles |
scientific article; zbMATH DE number 5002964 |
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Data transformation in SPC for semiconductor machinery control: A case of monitoring particles (English)
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2 February 2006
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machinery control
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semiconductor manufacturing
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control chart
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particle counts
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0.7542141675949097
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0.7134288549423218
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0.7105533480644226
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0.7084969282150269
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