Multi-step virtual metrology for semiconductor manufacturing: a multilevel and regularization methods-based approach (Q337315)
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scientific article; zbMATH DE number 6650786
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| English | Multi-step virtual metrology for semiconductor manufacturing: a multilevel and regularization methods-based approach |
scientific article; zbMATH DE number 6650786 |
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Multi-step virtual metrology for semiconductor manufacturing: a multilevel and regularization methods-based approach (English)
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10 November 2016
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chemical vapor deposition
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etching
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industry automation
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lasso
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lithography
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regularization methods
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ridge regression
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semiconductor manufacturing
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statistical modeling
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virtual metrology
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0.8305120468139648
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0.6505283117294312
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0.6470381021499634
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0.6416931748390198
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