Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach (Q869631)
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scientific article; zbMATH DE number 5131610
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| English | Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach |
scientific article; zbMATH DE number 5131610 |
Statements
Multiple-input dual-output adjustment scheme for semiconductor manufacturing processes using a dynamic dual-response approach (English)
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8 March 2007
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process adjustment
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run-to-run feedback control
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dual-response optimization
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semiconductor manufacturing
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on-line quality control
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0.8136844038963318
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0.7802168130874634
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0.766846239566803
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0.7550171613693237
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0.7298617362976074
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