A resonant micro accelerometer based on electrostatic stiffness variation (Q400187)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A resonant micro accelerometer based on electrostatic stiffness variation |
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A resonant micro accelerometer based on electrostatic stiffness variation (English)
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21 August 2014
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MEMS
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resonant accelerometer
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electrostatic stiffness
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out-of plane sensing
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pull-in instability
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