A resonant micro accelerometer based on electrostatic stiffness variation (Q400187)
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scientific article; zbMATH DE number 6333119
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| English | A resonant micro accelerometer based on electrostatic stiffness variation |
scientific article; zbMATH DE number 6333119 |
Statements
A resonant micro accelerometer based on electrostatic stiffness variation (English)
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21 August 2014
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MEMS
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resonant accelerometer
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electrostatic stiffness
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out-of plane sensing
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pull-in instability
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0.7689764499664307
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0.7445539236068726
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0.7120685577392578
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0.7112140655517578
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