Parameter retrieval in electron microscopy by solving an inverse scattering problem (Q4450285)
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scientific article; zbMATH DE number 2042481
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| English | Parameter retrieval in electron microscopy by solving an inverse scattering problem |
scientific article; zbMATH DE number 2042481 |
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15 February 2004
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inverse scattering problem
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regularization technique
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0.8901962
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0.8578436
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0.8563045
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0.8562743
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0.84895164
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0.8475677
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0.84719926
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0.84708023
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Parameter retrieval in electron microscopy by solving an inverse scattering problem (English)
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In electron microscopy, object data can be retrieved directly from the exit wave function via locally linearized analytical inverse solutions of the scattering problem instead of using trial-and-error iterative image matching. But this problem is ill-posed due to modeling errors. The author presents the regularization to control the confidence region and the stability of the retrieval procedure. For the entire collection see [Zbl 1029.00072].
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