Parameter retrieval in electron microscopy by solving an inverse scattering problem

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In electron microscopy, object data can be retrieved directly from the exit wave function via locally linearized analytical inverse solutions of the scattering problem instead of using trial-and-error iterative image matching. But this problem is ill-posed due to modeling errors. The author presents the regularization to control the confidence region and the stability of the retrieval procedure. For the entire collection see [Zbl 1029.00072].











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