Recursive Bayesian state estimation method for run-to-run control in high-mixed semiconductor manufacturing process (Q6563442)
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scientific article; zbMATH DE number 7872656
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| English | Recursive Bayesian state estimation method for run-to-run control in high-mixed semiconductor manufacturing process |
scientific article; zbMATH DE number 7872656 |
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Recursive Bayesian state estimation method for run-to-run control in high-mixed semiconductor manufacturing process (English)
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27 June 2024
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Bayesian estimation theory
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high-mix semiconductor manufacturing process
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run-to-run control
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state estimation
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0.707737386226654
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0.6847031116485596
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0.6827512383460999
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