Recursive Bayesian state estimation method for run-to-run control in high-mixed semiconductor manufacturing process

DOI10.1002/ASJC.1977MaRDI QIDQ6563442zbMATH OpenFDO

Authors Fei Tan, Tianhong Pan, Jun Bian, Hai-Yan Wang, Weiran Wang

Publication date 27 June 2024

Published in Asian Journal of Control (Search for Journal in Brave)

zbMATH Keywords

state estimationrun-to-run controlBayesian estimation theoryhigh-mix semiconductor manufacturing process

Mathematics Subject Classification ID

Systems theory; control (93-XX)

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Cites work

• A sampled-data approach to distributed \(H_\infty\) resilient state estimation for a class of nonlinear time-delay systems over sensor networks
• An interacting multiple model approach for state estimation with non-gaussian noise using a variational Bayesian method

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