Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA) (Q991812)
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scientific article; zbMATH DE number 5780959
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| English | Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA) |
scientific article; zbMATH DE number 5780959 |
Statements
Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA) (English)
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8 September 2010
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photolithography area
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process window
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machine dedication
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heuristic
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linear programming
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0.863956093788147
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0.7896966934204102
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0.7724025249481201
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0.7702597379684448
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