Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA) (Q991812)

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Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA)
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    Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA) (English)
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    8 September 2010
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    photolithography area
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    process window
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    machine dedication
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    heuristic
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    linear programming
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