Knowledge acquisition from batch semiconductor manufacturing data

DOI10.1016/S1088-467X(99)00030-XMaRDI QIDQ4421272zbMATH OpenOpenAlexFDO

Authors Dolores del Castillo Sobrino, Luis J. Barrios Bravo

Publication date 1999

Published in Intelligent Data Analysis (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/s1088-467x(99)00030-x

zbMATH Keywords

association rulesdependency relationshipsinductive learning

Mathematics Subject Classification ID

Learning and adaptive systems in artificial intelligence (68T05)

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• Development of a framework for analyzing process monitoring data with applications to semiconductor manufacturing process
• Noise and Learning in Semiconductor Manufacturing
• Data analytics and stochastic modelling in a semiconductor fab
• Real-manufacturing-oriented big data analysis and data value evaluation with domain knowledge

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