Data analytics and stochastic modelling in a semiconductor fab

DOI10.1002/ASMB.828MaRDI QIDQ5391290zbMATH OpenOpenAlexFDO

Authors Sugato Bagchi, Roberto J. Baseman, Andrew J. Davenport, Ramesh Natarajan, Noam Slonim, Sholom M. Weiss

Publication date 6 April 2011

Published in Applied Stochastic Models in Business and Industry (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/asmb.828

zbMATH Keywords

data miningstochastic optimizationsemiconductor fabs

Mathematics Subject Classification ID

Production models (90B30)

Recommendations

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Cites work

• Constraint-based scheduling: Applying constraint programming to scheduling problems.
• New exact algorithms for one-machine earliness-tardiness scheduling

Cited in

(4)

• Knowledge acquisition from batch semiconductor manufacturing data
• Statistics for microelectronics
• Failure probability estimation with differently sized reference products for semiconductor burn-in studies
• Development of a framework for analyzing process monitoring data with applications to semiconductor manufacturing process

Describes a project that uses

Uses Software

• ILOG SCHEDULE

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