Statistics for microelectronics

DOI10.1002/ASMB.1994MaRDI QIDQ6570834zbMATH OpenFDO

Authors Riccardo Borgoni, Laura Deldossi, Luigi Radaelli, Diego Zappa

Publication date 10 July 2024

Published in Applied Stochastic Models in Business and Industry (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/ASMB.1994

zbMATH Keywords

semiconductor manufacturingprocess controlintegrated circuit

Mathematics Subject Classification ID

Statistics (62-XX)

Cites work

• Data analytics and stochastic modelling in a semiconductor fab
• Misclassification rates, critical values and size of the design in measurement systems capability studies
• Optimal reduction of a spatial monitoring grid: proposals and applications in process control

Cited in

(2)

• Modeling and analyzing semiconductor yield with generalized linear mixed models
• Identification of spatial defects in semiconductor manufacturing

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